The Nano Positioning Book: Moving and Measuring to Better than a Nanometre
ISTE Publishing Company | September 1997 | ISBN-10: 0953065804 | 120 pages | PDF | 9.09 MB
Because the existing terms used in specifying nano precision mechanisms (accuracy, precision, linearity) are subject to ambiguous international standards, this book defines and clarifies the terms in a full glossary and includes general descriptions of the core technologies involved.
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