كيمياء فيزيائية Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies)

المصدر: Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies)
في منتدى : قسم الكيمياء

بسم الله الرحمن الرحيم

Handbook of Silicon Based MEMS Materials and Technologies
(Micro and Nano Technologies)
By
Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka

Publisher
William Andrew
Number Of Pages: 700
Publication Date: 2010-01-26
ISBN-10 / ASIN: 0815515944
ISBN-13 / EAN: 9780815515944

Product Description
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.

Key topics covered include
Silicon as MEMS material
Material properties and measurement techniques
Analytical methods used in materials characterization
Modeling in MEMS
Measuring MEMS
Micromachining technologies in MEMS
Encapsulation of MEMS components
Emerging process technologies, including ALD and porous silicon

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