كتاب : Pvd for Microelectronics: Sputter Deposition Applied to Semiconductor Manufact

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Pvd for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films)

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Pvd for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films)
By Ronald A. Powell

Publisher: Academic Press
Number Of Pages: 419
Publication Date: 1998-11-15
ISBN-10 / ASIN: 012533026X
ISBN-13 / EAN: 9780125330268
Binding: Hardcover

GENERAL DESCRIPTION OF THE SERIES
Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of variousthin films materials and systems.
In order to be able to reflect the development of today’s science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics ofThin Films to Thin Films.
GENERAL DESCRIPTION OF THE VOLUME
This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts.


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