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Handbook of VLSI Microlithography By John N. Helbert
Publisher: William Andrew | ISBN: 0815514441 | 2001 | PDF | 1024 pages | 5.84 Mb
This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process pattern transfer coatings -- including optical lithography, electron-beam, ion-beam, and X-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry.
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