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Ion-Solid Interactions: Fundamentals and Applications
(Cambridge Solid State Science Series)
By
Michael Nastasi James Mayer James K. Hirvonen
ISBN-10: 052137376X ISBN-13: 9780521373760
PublisherCambridge University Press - 1996-03-29
Hardcover | 568 Pages
:gift::gift:
Ion-Solid Interactions: Fundamentals and Applications
(Cambridge Solid State Science Series)
By
Michael Nastasi James Mayer James K. Hirvonen
ISBN-10: 052137376X ISBN-13: 9780521373760
PublisherCambridge University Press - 1996-03-29
Hardcover | 568 Pages
Editorial Review
Modern technology depends on materials with precisely controlled properties. Ion beams are an excellent way to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition to integrated circuit technology, ion beams can modify the mechanical, tribological, and chemical properties of metal, intermetallic, and ceramic materials without altering their bulk properties. Ion-solid interactions are the foundation that underlies the broad application of ion beams to the modification of materials. This text covers the fundamentals and applications of ion-solid interactions, and is aimed at graduate students and researchers interested in electronic devices, surface engineering, reactor and nuclear engineering, and materials science issues associated with metastable phase synthesis.
Modern technology depends on materials with precisely controlled properties. Ion beams are an excellent way to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition to integrated circuit technology, ion beams can modify the mechanical, tribological, and chemical properties of metal, intermetallic, and ceramic materials without altering their bulk properties. Ion-solid interactions are the foundation that underlies the broad application of ion beams to the modification of materials. This text covers the fundamentals and applications of ion-solid interactions, and is aimed at graduate students and researchers interested in electronic devices, surface engineering, reactor and nuclear engineering, and materials science issues associated with metastable phase synthesis.
Table of Contents
List of symbols
Preface
Ch. 1 General features and fundamental concepts 1
Ch. 2 Interatomic potentials 14
Ch. 3 Dynamics of binary elastic collisions 39
Ch. 4 Cross-section 62
Ch. 5 Ion stopping 88
Ch. 6 Ion range and range distribution 115
Ch. 7 Radiation damage and spikes 141
Ch. 8 Ion-solid simulations and diffusion 191
Ch. 9 Sputtering 218
Ch. 10 Order-disorder and ion implantation metallurgy 254
Ch. 11 Ion beam mixing 295
Ch. 12 Phase transformations 332
Ch. 13 Ion beam assisted deposition 363
Ch. 14 Applications of ion beam processing techniques 408
Appendix A: Crystallography 483
Appendix B: Table of the elements 491
Appendix C: Density of states 498
Appendix D: Derivation of the Thomas-Fermi differential equation 503
Appendix E: Center-of-mass and laboratory scattering angles 505
Appendix F: Miedema's semi-empirical model for the enthalpy of formation in the liquid and solid states 509
Appendix G: Implantation metallurgy - study of equilibrium alloys 519
Appendix H: Physical constants, conversions and useful combinations 529
List of symbols
Preface
Ch. 1 General features and fundamental concepts 1
Ch. 2 Interatomic potentials 14
Ch. 3 Dynamics of binary elastic collisions 39
Ch. 4 Cross-section 62
Ch. 5 Ion stopping 88
Ch. 6 Ion range and range distribution 115
Ch. 7 Radiation damage and spikes 141
Ch. 8 Ion-solid simulations and diffusion 191
Ch. 9 Sputtering 218
Ch. 10 Order-disorder and ion implantation metallurgy 254
Ch. 11 Ion beam mixing 295
Ch. 12 Phase transformations 332
Ch. 13 Ion beam assisted deposition 363
Ch. 14 Applications of ion beam processing techniques 408
Appendix A: Crystallography 483
Appendix B: Table of the elements 491
Appendix C: Density of states 498
Appendix D: Derivation of the Thomas-Fermi differential equation 503
Appendix E: Center-of-mass and laboratory scattering angles 505
Appendix F: Miedema's semi-empirical model for the enthalpy of formation in the liquid and solid states 509
Appendix G: Implantation metallurgy - study of equilibrium alloys 519
Appendix H: Physical constants, conversions and useful combinations 529
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or
http://ifile.it/yuqbhe/ion-solid_interactions._fundamentals_and_applications_isbn052137376x.rar
or
http://ifile.it/5spf4ai/28266.rar
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Index 531
Archive: RAR
Format: Djvu
Size: 5.53 Mb
Archive: RAR
Format: Djvu
Size: 5.53 Mb
